PDMS-Coated Piezoresistive NEMS Diaphragm for Chloroform Vapor Detection
نویسندگان
چکیده
منابع مشابه
Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
A pressure sensor with a 200 μm diaphragm using silicon nanowires (SiNWs) as a piezoresistive sensing element is developed and optimized. The SiNWs are embedded in a multilayered diaphragm structure comprising silicon nitride (SiNx) and silicon oxide (SiO2). Optimizations were performed on both SiNWs and the diaphragm structure. The diaphragm with a 1.2 μm SiNx layer is considered to be an opti...
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ژورنال
عنوان ژورنال: IEEE Electron Device Letters
سال: 2012
ISSN: 0741-3106,1558-0563
DOI: 10.1109/led.2012.2195152